The design and manufacture of a high-pressure, supercritical fluid machine tools for the cleaning of refined silicon wafers used in the production of advanced integrated circuit wafers.

Challenges Presented:

• To build ASME Division 1 and Division 2 pressure vessels consisting entirely of machined parts completely devoid of any welded joints.

• Finish of all process side machined surfaces had to meet stringent industry decontamination specifications.

MME’s Custom Solutions:

MME’s acquisition of its ASME Division 2 Certification of Authorization further enabled us to develop and perfect the manufacturing techniques required to provide pressure chambers that were electro-mechanically operated while able to maintain absolute pressure boundary integrity.

Functional & Economic Benefits to Customer:

While not only receiving a highly profitable vessel and methodology, the customer was able to evolve its technological advantage in both its product and production offering in the semi-conductor industry.